Rudolph Announces New Metrology Suite for Advanced Packaging

Rudolph Announces New Metrology Suite for Advanced Packaging

New NSX Metrology Series includes application-specific configurations to address unique metrology requirements for wafer level packaging, 2.5D and 3DIC

FLANDERS, N.J.--(BUSINESS WIRE)-- Rudolph Technologies, Inc. (NAS: RTEC) , a leading provider of process characterization, photolithography equipment and software for the semiconductor, FPD, LED and solar industries, today released three new application-specific configurations of its industry-leading NSX® 320 Automated Macro Defect Inspection System. The suite includes specially-designed configurations for wafer level packaging, 2.5D (interposer) and 3DICs using through-silicon via (TSV) as interconnects. The first NSX 320 Metrology System for wafer level packaging shipped in June to a major outsourced assembly and test (OSAT) facility in Asia.


"These new application-specific configurations of our established NSX 320 System are designed to address the emerging need for fast, precise three-dimensional (3D) measurements in the rapidly growing advanced packaging market sector," said Rajiv Roy, vice president of business development and director of back-end marketing at Rudolph Technologies. "We have completed the integration of 3D measurement sensors, recently acquired from Tamar Technology, into the NSX System. Tamar's sensor technology is well recognized and widely used, and integrating it into the NSX 320 System adds critical capability required for enabling advanced packaging applications such as copper pillar bumping and TSV."

The NSX 320 wafer level packaging configuration is designed to measure film thickness (polymers, photoresist, glass), thin remaining silicon thickness (RST), surface topography, copper pillar height and solder bump height. The advanced wafer level packaging configuration adds measurements of the wafer profile (warp and bow), total stack thickness and thick/thin RST (bonded wafer before and after grind). The 3DIC configuration is capable of all the above measurements plus via depth, trench depth, bonded wafer TTV and adhesive layers.

Roy stated, "3DIC device volume is forecasted to grow to $38.4B by 2017, according to Yole Développement. Rudolph is positioned to address the growth requirements for wafer level packaging, as well as 2.5D and other advanced packaging technologies, with industry-proven metrology tools that offer superior speed and measurement solutions."

For more information about Rudolph's NSX 320 Metrology Series, visit www.rudolphtech.com.

About Rudolph Technologies
Rudolph Technologies, Inc. is a worldwide leader in the design, development, manufacture and support of defect inspection, advanced packaging lithography, process control metrology, and data analysis systems and software used by semiconductor device manufacturers worldwide. Rudolph provides a full-fab solution through its families of proprietary products that provide critical yield-enhancing information, enabling microelectronic device manufacturers to drive down the costs and time to market of their products. The Company's expanding portfolio of equipment and software solutions is used in both the wafer processing and final manufacturing of ICs, and in adjacent markets such as FPD, LED and Solar. Headquartered in Flanders, New Jersey, Rudolph supports its customers with a worldwide sales and service organization. Additional information can be found on the Company's website at www.rudolphtech.com.

Safe Harbor Statement
This press release contains forward-looking statements within the meaning of the Private Securities Litigation Reform Act of 1995 (the "Act") which include the benefits to customers of Rudolph's products, Rudolph's existing market position and its ability to maintain and advance such position relative to its competitors and Rudolph's ability to meet the expectations and needs of our customers as well as other matters that are not purely historical data. Rudolph wishes to take advantage of the "safe harbor" provided for by the Act and cautions that actual results may differ materially from those projected as a result of various factors, including risks and uncertainties, many of which are beyond Rudolph's control. Such factors include, but are not limited to, delays in shipping products for technical performance, component supply or other reasons, the company's ability to leverage its resources to improve its positions in its core markets and fluctuations in customer capital spending. Additional information and considerations regarding the risks faced by Rudolph are available in Rudolph's Form 10-K report for the year ended December 31, 2012 and other filings with the Securities and Exchange Commission. As the forward-looking statements are based on Rudolph's current expectations, the company cannot guarantee any related future results, levels of activity, performance or achievements. Rudolph does not assume any obligation to update the forward-looking information contained in this press release.



Rudolph Technologies, Inc.
Investors:
Steven R. Roth, 973-448-4302
steven.roth@rudolphtech.com
or
Trade Press:
Amy Pauling, 952-259-1794
amy.pauling@rudolphtech.com

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